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-407B-1-S-CES293 RobotversusTD 20 Turbo Drive Vacuum Controller

ABM -407B-1-S-CES293 Robot, Leybold TD 20 Turbo Drive Vacuum Controller, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
-407B-1-S-CES293 RobotABM
TD 20 Turbo Drive Vacuum ControllerLeybold
OEMABMLeybold
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Wafer size——
Process node——
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FamilyABM -407B-1-S-CES293 RobotLeybold TD 20 Turbo Drive Vacuum Controller
Cited variants—
  • Turbo.Drive TD20 classic with 9-way PLC interface[1]
  • Turbo.Drive TD20 classic with additional RS 232 interface[1]
  • Turbo.Drive TD20 classic with additional Profibus interface[1]
  • Turbo.Drive TD20 classic with additional RS 485 interface[1]
  • Turbo.Drive TD20 classic with additional 25-way PLC interface[1]
  • Turbo.Drive TD20 classic with additional DeviceNet interface[1]
  • Turbo.Drive TD20 classic with additional Ethernet/IP interface[1]
  • Turbo.Drive TD20 classic with 9-way PLC interface and adapter for pump connection with DIN plug[1]
Specifications
ModelABM-407B-1-S-CES293[2]—
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Configuration—50/60 Hz[3]
In—100-240Vac[3]
Out—0-47V 0-330W 0-835Hz[3]
Mains Connection—100 to 240 V AC -15%/+10%, 50/60 Hz[1]
Power Consumption (including options)—< 500 VA[1]
Power Output (Motor) Nominal Voltage—47 V[1]
Power Output (Motor) Current Limitation (Acceleration, max. 10 min.)—5 A[1]
Power Output (Motor) Current (Continuous Operation)—3.5 A[1]
Power Output (Motor) Frequency—0 to 835 Hz[1]
Ambient Temperature (Operation)—0-45 °C[1]
Storage Temperature—-25 °C ... +70 °C[1]
Relative Air Humidity—5 to 85 % (non-condensing)[1]
Type of Protection—IP 20[1]
Dimensions—1/2 19", 3HU[1]
Weight—4 kg[1]
TURBOVAC 151 Speed Rating—49,980 min-1[1]
TURBOVAC 361 Speed Rating—45,000 min-1[1]
TURBOVAC 600 Speed Rating—36,000 min-1[1]
TURBOVAC 1000 Speed Rating—36,000 min-1[1]
TURBOVAC 1100 Speed Rating—30,000 min-1[1]
Power Consumption of the TURBOVAC—< 400 VA[1]
Nominal motor voltage—47 V[1]
Motor current limitation during acceleration (max. 10 min)—5 A[1]
Motor current limitation in continuous operation—3.5 A[1]
Frequency range—0 to 835 Hz[1]
Ambient temperature—0-45 °C[1]
Type of protection—IP 20 (to EN 6059)[1]
Electrical safety standard—EN 61010-1[1]
Interference radiation standard—to 61326-1 Class A[1]
EMC standard—to IEC 801-2 Severity 2[1]
Standard interface—9-way PLC interface[1]
Optional interfaces—RS 232, Profibus, RS 485, 25-way PLC, DeviceNet, Ethernet/IP[1]
Compatible TURBOVAC pumps—TURBOVAC 151, 151C, 361, 361C, 600, 600C, 1000, 1000C, 1100C[1]
Replaces TURBOTRONIK models—NT 20, NT 151/361, NT 361[1]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]lesker.comlesker.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]inventory listing