Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Accretech , Tokyo Semitsu Kogaku (TSK) UF3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF3000Accretech | |
|---|---|---|
| OEM | ABM | Accretech |
| Category | — | — |
| Wafer size | — | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Accretech , Tokyo Semitsu Kogaku (TSK) UF3000 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | UF3000[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Wafer size | — | Wafer Equipment[2] |
| Currently Configured for | — | 300mm[2] |
| With Chiller | — | SCU-600B[2] |
| Section 1 | — | Tool General Information[2] |
| Section 2 | — | Tool Specific Information[2] |
| Manufacturer | — | Accretech, Tokyo Semitsu Kogaku (TSK)[2] |
| Category | — | Wafer Equipment[2] |
| Equipment type | — | Wafer Prober[2] |
| Tool status | — | In production[2] |
| Tool location | — | Cleanroom[2] |
| Chiller | — | SCU-600B[2] |
| Vendor tool serial number | — | F24006MZ[2] |
| Micron MISTI/LID number | — | FE3SKAA300(TMM)[2] |
| Year | — | 2004[3] |
| Quantity | — | 9[4] |
| Short description | — | Fully Automated Prober[4] |
| Version | — | 300 mm[4] |
| Nickel chuck | — | 12 inch[4] |
| Front loading | — | 300 mm single FOUP loading[4] |
| Robot blade | — | Dual ceramic robot blade[4] |
| Software version | — | S5.0FC4[4] |
| Loader type | — | TSK[4] |
| Chuck temperature range | — | 30~150℃[4] |
| OCR camera type | — | Type6[4] |
| Auto card change | — | Yes[4] |
| Needle cleaning unit | — | 150 mm x 150 mm ceramics pad[4] |
| Manipulator | — | Hinge, MHF4000[4] |
| Test system interface | — | AL6050 & Focus3000[4] |
| Includes | — | Printer[4] |