Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Applied Materials 9500 XR 200 S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9500 XR 200 SApplied Materials | |
|---|---|---|
| OEM | ABM | Applied Materials |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Applied Materials PI 9500 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Phase | — | 3 Phase + Neutral[2] |
| Configuration | — | 50/60 Hz[2] |
| Voltage | — | 208 V[2] |
| CPU | — | MVME162-P244LSE[2] |
| Software | — | 4.06[2] |
| BF3 | — | SDS[2] |
| PH3 | — | SDS[2] |
| AsH3 | — | SDS[2] |
| SiF4 | — | SDS[2] |
| Argon | — | External Feed[2] |
| Chamber | — | CT-10 Cryos[2] |
| Source Turbo | — | STP-1000C[2] |
| Mrs Turbo | — | STP-361C[2] |
| Source Backing | — | QDP40[2] |
| Wafer Loader | — | QDP80 w/ EH500 Blower[2] |
| Source Type | — | IHC[2] |
| Oven Capabilities | — | Oven fitted to source[2] |
| Wafer Sizes | — | 6 inch[2] |
| Power | — | 3 Phase + Neutral - 50/60 Hz - 208 V[2] |
| Gas Box Gases | — | BF3: SDS, PH3: SDS, AsH3: SDS, SiF4: SDS, Argon: External Feed[2] |
| Enlarged Chamber | — | Yes[2] |
| Source Magnet | — | 40A[2] |
| Extraction | — | Dual Bellows 60kV[2] |
| Post Acell | — | 160kV max[2] |
| Total Energy | — | 200kV max[2] |
| Plasma Flood Gun | — | HDPFS[2] |
| Wheel | — | Direct Drive[2] |
| Tilt | — | 0 to 7[2] |
| Orient | — | fitted, not in use[2] |
| Flat Not Found Sensor | — | fitted, not in use[2] |
| Gripper | — | Hollow[2] |
| Wafer on Gripper Sensor | — | 2000 Vintage[2] |