Comparison ledger
ABM -407B-2-S-CE-S293 Robot, CEE Apogee 450 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | CEE |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | CEE Apogee |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | Apogee 450[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | 208-240 V[2] |
| Equipment type | — | Spin coater[2] |
| Wafer sizes | — | 6, 8, 12 inch[2] |
| Max substrate size | — | 450 mm round or 14" x 14" square[3] |
| Max spin speed | — | 6,000 rpm[3] |
| Max acceleration | — | 30,000 rpm/s[3] |
| Spin speed repeatability | — | 0.2 rpm[3] |
| Acceleration resolution | — | < 0.2 rpm/s[3] |
| Spin speed resolution | — | 0.2 rpm[3] |
| GUI | — | 7-inch full-color touchscreen[3] |
| Number of recipes | — | Unlimited[3] |
| Step time resolution | — | 0.1 s[3] |
| Weight | — | 85 lb (38.6 kg)[3] |
| Voltage | — | 208-230 VAC[3] |
| Drain port | — | 3/4" OD[3] |
| Full load current | — | 6A (max)[3] |
| Exhaust port | — | 1.5" OD, 0.4” H2O @ 30 CFM (100 Pa @ 50 CMH)[3] |
| Vacuum | — | 1/4" push to connect, <33 kPa abs[3] |
| Automated dispense gas | — | N2/CDA, 70 psi (482 kPa)[3] |
| Interface | — | USB 2.0, Ethernet, StreamSync™ communication protocol[4] |
| Chamber material | — | HDPE spin bowl[4] |
| Vacuum and lid interlock | — | Yes[4] |