Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Lam Research TCP 9400, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TCP 9400Lam Research | |
|---|---|---|
| OEM | ABM | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1996– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Lam Research TCP 9400 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Etch Technology | — | Transformer Coupled Plasma (TCP)[3] |
| RF Frequency | — | 13.56 MHz[3] |
| Number of RF Power Supplies | — | 2[3] |
| Maximum Etch Depth | — | 3 µm[3] |
| Primary Materials Etched | — | Silicon[3] |
| Other Materials Etched | — | Silicon Germanium, Germanium[3] |
| Gases | — | Chlorine, He/O2, Helium, Hydrogen Bromide, Nitrogen, Oxygen, Perfluoroethane, Tetrafluoromethane[3] |
| Substrate Sizes (SNF configuration) | — | 4 inch[3] |
| Substrate Sizes (standard configuration) | — | 8 inch[4] |
| Maximum Wafer Load | — | 25 wafers[3] |
| Transport System | — | Cassette to cassette[1] |
| Software | — | Envision version 1.4[1] |
| Vintage Year | — | 1996[1] |
| Platform | — | Rainbow[1] |
| Vacuum Pump | — | Leybold TURBOVAC 1000C[1] |
| Chamber Type | — | Ceramic free with waferless auto clean (WAC)[1] |
| Configuration | — | Single chamber stand-alone[1] |
| Inductively Coupled Source | — | TCP 9400 ESC[1] |
| CE Certified | — | Yes[1] |