Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Ultron UH 130 12 Die Matrix Expander, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Ultron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Ultron UH 130 12 Die Matrix Expander |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | UH 130 12 / UH130-12[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| OEM | — | Ultron[3] |
| Equipment type | — | Die Matrix Expander[3] |
| Wafer capacity | — | up to 12 inch (300 mm) wafers or film frames[4] |
| Pneumatic ram | — | speed controlled[4] |
| Ram stroke | — | 2.3 inch adjustable[4] |
| Emergency stop | — | included[4] |
| Clamp type | — | manual[4] |
| Heated stage | — | digital temperature controlled[4] |
| Temperature sensor | — | thermistor[4] |
| Stroke stop | — | adjustable[4] |
| Expansion repeatability | — | consistent and controlled[4] |
| Shroud material | — | plexiglass[4] |
| Shroud feature | — | anti-static[4] |
| Die separation distance control | — | precise[4] |
| Alignment pins | — | included[4] |
| Film frame placement | — | easy and precise[4] |
| Design type | — | tabletop[4] |
| Operation | — | easy to operate[4] |
| Operator variable influence | — | virtually eliminated[4] |
| Lower clamp assembly | — | outer grip ring[1] |
| Upper clamp assembly | — | inner grip ring[1] |
| Clamp hinge function | — | upper and lower clamps hinge separately[1] |
| Grip ring compatibility | — | larger grip rings supported[1] |