Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, MATTSON STEAG / AST SHS 2800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | STEAG / AST SHS 2800MATTSON |
|---|---|---|
| OEM | Accretech | MATTSON |
| Category | — | — |
| Wafer size | Wafer Equipment | STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | MATTSON STEAG / AST SHS 2800 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Phase | — | Other V 50 Hz 3 Phase OEM Model Description |