Comparison ledger
Aixtron AIX 2600 G 3 MOCVD, Applied Materials 0020 18698 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AIX 2600 G 3 MOCVDAixtron | 0020 18698 PartApplied Materials |
|---|---|---|
| OEM | Aixtron | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Aixtron AIX 2600 G 3 MOCVD | Applied Materials 0020 18698 Part |
| Specifications | ||
| Configuration | 12*4"[1] | Dial Cover, Side Local Match, Hdpcvd, Ul[3] |
| OEM | Aixtron[1] | — |
| Model | AIX 2600 G 3[1] | — |
| Equipment type | MOCVD reactor[2] | — |
| Wafer sizes | 2, 3, and 4 inch[2] | — |
| Wafer capacity | 8 wafers per run[2] | — |
| Substrate materials | GaAs or InP[2] | — |
| Hydride / metal-organic configuration | 7 hydrides and 8 metal-organics; or 9 hydrides and 9 metal-organics[2] | — |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →