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Comparison ledger

AIX 2600 G 3 Planetary Reactorversus0010-13622 RF Match for

Aixtron AIX 2600 G 3 Planetary Reactor, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIX 2600Applied Materials 0010-13622 RF Match for
Specifications
Phase3 Phase[1]—
Frequency60 Hz[1]—
Configuration208/480V[1]High Efficiency HE RF Match-Bias[3]
CategoryDeposition[2]—
FamilyAIX 2600 family[2]—
Power phase3 Phase[1]—
Voltage208/480V[1]—
Vintage2000 Vintage[1]—
Model—0010-13622[3]
Product Type—RF Match for PVD (Physical Vapor Deposition)[3]
Feature—High Efficiency HE RF Match-Bias[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing