Waferpedia

Comparison ledger

G10-GaNversus0020 18455 Part

Aixtron G10-GaN, Applied Materials 0020 18455 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
G10-GaNAixtron
0020 18455 PartApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron G10-GaNApplied Materials 0020 18455 Part
Specifications
Product categoryDeposition system (MOCVD)[1]—
Product typeDeposition system[1]—
ProcessMOCVD[2]—
Wafer size150/200 mm[2]—
ApplicationGaN power & RF applications[2]—
Throughput classHigh throughput epitaxy[2]—
Process chambers3 process chambers[2]—
Cluster designCompact cluster design[2]—
Reactor technologyPlanetary Reactor®[2]—
Configuration—Shaft,Rf In Local Match, Hdpcvd,Rev3[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]aixtron.comaixtron.com
  2. [2]aixtron.comaixtron.com
  3. [3]inventory listing