Waferpedia

Comparison ledger

0010-03254 E Chuckversus4PP-TypeH

Applied Materials 0010-03254 E Chuck, KLA 4PP-TypeH, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
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Control system——
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Family—KLA 4PP-TypeH
Specifications
Product type—Four-point probe (4PP)[1]
Probe spacing—0.6mm[2]
Tip radius—200um[2]
Force—100gm[2]
Load—100gm[3]
Material—230-0920[3]
Intended use—Implant/high impedance surface measurement[3]
Compatible systems—Filmetrics R50 / R54 4PP measurement systems[3]
Manufacturer—Filmetrics[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]store.kla-instruments.comstore.kla-instruments.com
  2. [2]cntech.co.ukcntech.co.uk
  3. [3]store.kla-instruments.comstore.kla-instruments.com