Comparison ledger
Applied Materials 0010-03254 E Chuck, Leybold Trivac D 16 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Trivac D 16 BLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Leybold Trivac D 16 |
| Cited variants | — |
|
| Specifications | ||
| Volume Flow Rate | — | 16[2] |
| Pressure Limit | — | < = 1x10 -4[2] |
| Configuration | — | with Marathon Electric P/N 72260005[2] |
| Type | — | oil-sealed rotary vane pump[3] |
| Stage | — | dual-stage[3] |
| Pressure limit | — | <= 1x10-4[2] |
| Ultimate pressure | — | 10-4 mbar (0.75 x 10-4 Torr)[4] |
| Pumping speed | — | 19.8 m3/h (11.7 cfm)[4] |
| Motor voltage | — | 3-phase 50/60Hz[4] |
| Connections, intake and exhaust | — | 25 KF[4] |
| Inlet connection | — | DN 25 ISO-KF[1] |
| Outlet connection | — | DN 25 ISO-KF[1] |
| Nominal pumping speed at 50 Hz | — | 18.9 m3/h, 11.1 cfm[1] |
| Nominal pumping speed at 60 Hz | — | 22.7 m3/h, 13.4 cfm[1] |