Waferpedia

Comparison ledger

0010-03254 E ChuckversusSTEAG / AST SHS 2800

Applied Materials 0010-03254 E Chuck, MATTSON STEAG / AST SHS 2800, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsMATTSON
Category——
Wafer size—STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—MATTSON STEAG / AST SHS 2800
Specifications
Wafer size—STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8” Documents
Phase—Other V 50 Hz 3 Phase OEM Model Description