Waferpedia

Comparison ledger

0010-03254 E ChuckversusMVP 015 Vacuum

Applied Materials 0010-03254 E Chuck, Pfeiffer MVP 015 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer MVP
Specifications
Pumping Speed—15 L/min[1]
Mass—5.5 kg[1]
Power Consumption—0.04 kW[1]
Voltage—100 V, 50 Hz[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing