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0010-03485 Magnet AssyversusDektak 150 High Performance Surface Profiler

Applied Materials 0010-03485 Magnet Assy, Bruker Dektak 150 High Performance Surface Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsBruker
Category——
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FamilyApplied Materials 0010-03485 Magnet AssyBruker Dektak 150 High Performance Surface Profiler
Cited variants—
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Measurement Technique—Contact stylus profilometry[1]
Scan Length Range—55 mm standard; up to 200 mm with stitching option[1]
Data Points Per Scan—120,000 maximum[1]
Max. Sample Thickness—Up to 90 mm[1]
Max. Wafer Size—150 mm (200 mm with Advanced Automation Package)[1]
Step Height Repeatability—≤6 Å (D150); ≤4 Å (D150+ option); 1 sigma on 0.1 μm step[1]
Vertical Range—524 μm (1 mm optional)[1]
Vertical Resolution—1 Å max. (at 6.55 μm range)[1]
Stylus Force—1 to 15 mg with LIS 3 sensor; 0.03 to 15 mg with N-Lite sensor option[1]
Stylus Options—Radius options from 50 nm to 25 μm; HAR tips 10 μm x 2 μm and 200 μm x 20 μm[1]
Sample Stage—Manual X/Y/θ, 100 x 100 mm X-Y translation, 360° rotation, manual leveling; optional X-Y auto stage 150 mm travel, 1 μm repeatability; optional 200 mm wafer vacuum chuck; optional 6-inch square porous vacuum chuck[1]
Computer System—PC with Pentium D or Athlon processor[1]
Software—Dektak software running under Windows XP; Step Detection software (std.); optional Stress Measurement software; optional 3D Mapping with Vision analysis software; optional Stitching software[1]
Environment Temperature Range—Between 20 and 25°C (68 to 77°F)[1]
Humidity Range—≤50% ±20°C, non-condensing[1]
Dimensions—292 mm W x 508 mm D x 527 mm H[1]
Weight—34 kg (75 lbs)[1]
Certification—CE, NRTL, S2, S8*, China RoHS, EU RoHS[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]dp-pimm.s3.ensam.eudp-pimm.s3.ensam.eu
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com