Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusNVision 40

Applied Materials 0010-03485 Magnet Assy, Zeiss NVision 40, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsZeiss
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyZeiss NVision 40
Specifications
ConfigurationWP AL 300mm PVD[1]208-230 V[5]
OEMApplied Materials[1]—
Model0010-03485[1]NVision 40[5]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]Zeiss[5]
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Electron microscope type—SEM-FIB[6]
SEM column—Schottky field emission Gemini column[7]
SEM operating voltage—100 V to 30 kV[7]
SEM resolution—1.1 nm at 20 kV; 2.5 nm at 1 kV[7]
FIB column—SIINT Zeta Ga+ ion FIB column[7]
FIB operating voltage—1 kV to 30 kV[7]
FIB ion current—0.1 pA to 45 nA[7]
Ion beam resolution—4 nm at 1 pA[7]
Power—208-230 V[5]
Frequency—50-60 Hz[5]
Gas delivery—Has W, C SiO2 and H20 gases installed[8]
Micromanipulator—With kleindiek mm3a micromanipulator[5]
XeF2—Option, not installed[5]
Controller status—One of the controllers on the two turbo pumps is not operational[8]
Detectors—Everhart-Thornley detector, 4 quadrant backscatter, in-lens secondary electron detector, energy selective backscatter detector[7]
Lithography system—Raith Elphy Quantum lithography system[7]
Nanoscale lithography—NanoPattern Generating System (NPGS)[9]
Sources (9)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing
  6. [6]labwrench.comlabwrench.com
  7. [7]www-em.materials.ox.ac.ukwww-em.materials.ox.ac.uk
  8. [8]waferpedia.comwaferpedia.com
  9. [9]nanoscience.ucf.edunanoscience.ucf.edu