Waferpedia

Comparison ledger

0010-13622 RF Match forversus790

Applied Materials 0010-13622 RF Match for, Plasma-Therm 790, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
790Plasma-Therm
OEMApplied MaterialsPlasma-Therm
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forPlasma-Therm 790
Cited variants—
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[2]—
Model0010-13622[2]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[2]—
FeatureHigh Efficiency HE RF Match-Bias[2]—
Tool name—PECVD 1 (PlasmaTherm 790)[3]
System type—open-load etch and deposition systems[1]
Series reference—formerly Plasma-Therm 790+ series[1]
Process type—PECVD[3]
Category—Chemical Vapor Deposition (CVD)[3]
Archived series reference—formerly Plasma-Therm 790+ series open-load etch and deposition systems[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu