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0010-13627 High Efficiency RF MatchversusATR 8 Robot

Applied Materials 0010-13627 High Efficiency RF Match, Brooks ATR 8 Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchBrooks ATR 8 Robot
Specifications
ConfigurationHE, BIAS[1]Lam Tool[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Manufacturer—Brooks[2]
Model—ATR 8[2]
Wafer Sizes—12 inch[2]
Description—12" Lam Tool[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing