Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusTPU 060 Turbomolecular Vacuum

Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer TPU 060 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchPfeiffer TPU
Cited variants—
  • TPU 060 Mod PM P 01 401[1]
Specifications
ConfigurationHE, BIAS[2]—
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]Turbomolecular high vacuum system[4]
Mod—PM P 01 401[3]
Manufacturer—Pfeiffer[1]
Model—TPU 060[1]
Description—Turbomolecular vacuum pump[3]
Make—Pfeiffer[1]
Modification Code—PM P 01 401[1]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]reticulum.onlinereticulum.online