Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer TPU 510 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | TPU 510 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer TPU |
| Cited variants | — |
|
| Specifications | ||
| Configuration | HE, BIAS[2] | — |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | Turbomolecular Vacuum Pump[3] |
| Oil | — | F3 100ml[3] |
| S(N2) | — | 500 I/s[3] |
| Mass | — | 30 kg[3] |
| Model | — | TPU 510[3] |
| Make | — | Pfeiffer[3] |
| Intake flange | — | DN 160 CF-F[4] |
| Fore-vacuum flange | — | DN 40 KF[4] |
| Volume flow rate N2 | — | 500 l/s[4] |
| Volume flow rate He | — | 570 l/s[4] |
| Volume flow rate H2 | — | 500 l/s[4] |
| Speed | — | 60,000 rpm[4] |
| Weight | — | 30 kg[4] |
| Oil filling | — | 2x10 cm^3[4] |
| Cooling water requirement | — | 15 l/h[4] |
| Cooling water temperature | — | 5-25 C[4] |
| Permissible ambient temperature for air cooling | — | 0-35 C[4] |
| Power input of heater | — | 250 Watt[4] |
| Maximum compression ratio N2 | — | 8x10^8[4] |
| Maximum compression ratio He | — | 1.5x10^4[4] |
| Maximum compression ratio H2 | — | 1x10^3[4] |
| Ultimate pressure | — | 10^-11 mbar[4] |
| Recommended backing pump | — | 12 Acc electronic drive unit TCP 300 (TCP 300), TCP 310 (TCP 310), TCP 380[4] |
| Ultimate operating pressure | — | <1x10^-10 mbar[4] |
| Pressure | — | <1x10^-9 mbar[4] |
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