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Comparison ledger

0010-16392 ESC AssemblyversusCentura MXP

Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura MXP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Centura MXPApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyApplied Materials Centura MXP
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Configuration—3 CH[3]
Phase—3 Phase[3]
Frequency—50 Hz[3]
Voltage—208 VAC[3]
Wires—Four[4]
Full Load Current—240 A[4]
H/E 1—0242-02163 REV D[5]
UPS—DPWR 35611[5]
H/E (CH-B_C_D_Wall)—0242-02163 REV D[5]
Chambers—3 CH[3]
Robot—HP Robot[3]
Power Supply Voltage—208 VAC[3]
Power Supply Frequency—50 Hz[3]
Number of Wires—Four / 4 Wires[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing