Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusRainbow 4520 i Dielectric

Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4520 i Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research Rainbow 4520 i Dielectric
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]Rainbow 4520 i[4]
TypeESC Assembly[1]—
Wafer Size300 mm[2]6 inch[3]
Electrode ConfigurationDual[2]—
Make—Lam[4]
Application—Dielectric etching[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing