Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusArcher 10 Overlay Measurement

Applied Materials 0010-18024 Pyrometer Assembly, KLA Archer 10 Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Archer 10 Overlay Measurement
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
OEM—KLA[2]
Model—Archer 10[2]
Category—Metrology & Inspection[3]
Description—Overlay measurement[4]
Version—300mm[4]
Automated overlay measurement module—Fully automated[5]
Wafer handling—200mm dual open[5]
Wafer handler—200mm dual port open wafer handler[6]
Software—Windows NT based SW and User Interface[5]
Computer—KLASS RS2 computer[6]
Computer upgrade—XP computer upgrade[6]
Integration software—KLASS station integration software[5]
Optical module—coherence probe interference microscope[5]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]classoneequipment.comclassoneequipment.com
  6. [6]waferpedia.comwaferpedia.com