Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusFLX 2320 Thin Film Stress Measurement

Applied Materials 0010-18024 Pyrometer Assembly, KLA FLX 2320 Thin Film Stress Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA FLX 2320
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Dual Wavelength[2]
Frequency—60 Hz[2]
Voltage—115 V[2]
Phase—1 Phase[3]
OEM—KLA[2]
Model—FLX 2320[2]
Tool type—Thin Film Stress Measurement System[2]
Wavelength mode—Dual Wavelength[2]
Wafer sizes—8 inch[3]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing