Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusP-17

Applied Materials 0010-18024 Pyrometer Assembly, KLA P-17, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
P-17KLA
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA P-17
Cited variants—
  • Tencor P-17 OF (Open Frame)[1]
Specifications
ConfigurationCapable of working on Applied Materials Radiance[2]—
Instrument type—Mechanical profilometer[3]
Z range—1 mm[3]
Vertical resolution—0.6 Å[3]
Lateral resolution—0.5 µm[3]
Step height range—Nanometers to 1000 µm[1]
Constant force control—0.03 to 50 mg[1]
Scan length (without stitching)—200 mm[1]
Video camera—5 MP high-resolution color[1]
Stylus tip radius options—40 nm to 50 µm[4]
Stylus included angle options—20 to 100 degrees[4]
Sample chuck range—50 to 200 mm[1]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]kla.comkla.com
  2. [2]inventory listing
  3. [3]epfl.chepfl.ch
  4. [4]kla.comkla.com