Waferpedia

Comparison ledger

0010-21246 PartversusATM ABM 105 107 107 B Atmospheric Wafer Handling Robot

Applied Materials 0010-21246 Part, Brooks ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsBrooks
Category——
Wafer size——
Process node——
Introduced——
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Family—Brooks ATM
Specifications
Configuration—Single Arm[1]
Manufacturer—Brooks / PRI[1]
Model—ATM / ABM 105 / 107 / 107 B[1]
Type—Atmospheric wafer handling robot[1]
Wafer size—6 inch and 12 inch[1]
Arm configuration—Single arm[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing