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0010-21246 PartversusDUO 20 M Vacuum

Applied Materials 0010-21246 Part, Pfeiffer DUO 20 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Duo
Cited variants—
Specifications
Oil—P3[2]
Max flow—24.0 m³/h[2]
Speed—1800 1/min[2]
Mass—42.5 kg[3]
Configuration—Pump needs complete overhaul[2]
Pump type—Dual-stage, high-performance rotary vane pump[1]
Applications—Low and medium vacuum applications[1]
Pumping speed at 50 Hz—20 m3/h[1]
Pumping speed at 60 Hz—24 m3/h[1]
Flange (in)—DN 25 ISO-KF[1]
Flange (out)—DN 25 ISO-KF[1]
Operating fluid—P3[1]
Operating fluid filling—1.1 l[1]
Rated power 50 Hz—0.75 kW[1]
Rated power 60 Hz—0.90 kW[1]
Rotation speed at 50 Hz—1500 min-1[1]
Rotation speed at 60 Hz—1800 min-1[1]
Ultimate pressure with gas ballast—4 × 10^-3 hPa[1]
Ultimate pressure without gas ballast—2 × 10^-3 hPa[1]
Weight—44 kg[1]
Inlet flange—DN 25 ISO-KF[1]
Outlet flange—DN 25 ISO-KF[1]
Magnetic coupling—Yes[1]
Integrated gas ballast—Yes[1]
HV safety valve—Integrated[4]
Motor type—1-phase motor[1]
Voltage—100-110 V at 50 Hz; 100-120 V at 60 Hz[1]
Sources (4)Every fact above is drawn from these public sources
  1. [1]avac.comavac.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]highvacdepot.comhighvacdepot.com