Waferpedia

Comparison ledger

0010-21246 PartversusTMH 1001 SG Turbo

Applied Materials 0010-21246 Part, Pfeiffer TMH 1001 SG Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer TMH
Specifications
Configuration—DN 200 ISO-K, 3P[1]
Oil—TL011 65 ml[1]
S(N2)—880 l/s[1]
Mass—40 kg[1]
Pumping Speed (Nitrogen)—880 l/s[1]
Inlet Flange—DN200 ISO-K[1]
Oil Type—TL011[1]
Oil Volume—65 ml[1]
Vintage—1997[1]
Motor Phase—3P[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing