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Comparison ledger

0010-22161 High EFF RF MatchversusUVision 3

Applied Materials 0010-22161 High EFF RF Match, Applied Materials UVision 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
UVision 3Applied Materials
OEMApplied MaterialsApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run—2007–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchApplied Materials UVision 3
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Type—DUV Brightfield wafer inspection tool[3]
Throughput improvement—40% faster than any competitive brightfield inspection tool[3]
Defect sensitivity—20 nm[3]
Laser architecture—Multi-beam DUV laser (triples the number of laser beams)[3]
Imaging modes—Two new imaging modes extending sensitivity to 20 nm[3]
Defect classification—Flexible automatic defect classification engine[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]nanotech-now.comnanotech-now.com