Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards EPX 500 LE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | EPX 500 LEEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards EPX 500 LE |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | EPX 500 LE[5] |
| Description | HTESC PH 1 REV A[2] | all-in-one atmosphere-to-hiVac dry vacuum pump[4] |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Ultimate vacuum | — | < 7 x 10^-7 Torr[3] |
| Pumping speed | — | 295 CFM[3] |
| Inlet flange | — | ISO63[3] |
| Exhaust flange | — | KF25[3] |
| Weight | — | 99 lbs[3] |
| Electrical supply | — | 208 VAC 3PH[4] |
| Water connector size | — | 3/8 in.[4] |
| Inlet size (alternative) | — | ISO 160[4] |
| Part number (without TIM) | — | A41953012[4] |
| Operating pressure range | — | Atmosphere to < 7 x 10^-7 Torr[4] |
| OEM | — | Edwards[5] |
| Type | — | dry pump[3] |
| Inlet | — | ISO 160[4] |
| Power | — | 208 VAC, 3-phase[4] |
| Type of product | — | dry pump[3] |
| Exhaust | — | KF25[3] |
| Power supply | — | 208 VAC 3PH[4] |
| Water connector | — | 3/8 in.[4] |
| Manufacturer | — | Edwards[5] |
| Product description | — | all-in-one atmosphere-to-hiVac dry vacuum pump[4] |
| Series feature | — | End User Controller (EUC)[4] |