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Comparison ledger

0010-22161 High EFF RF MatchversusRainbow 4520 XL

Applied Materials 0010-22161 High EFF RF Match, Lam Research Rainbow 4520 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Rainbow 4520 XLLam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
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Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchLam Research Rainbow 4520
Cited variants—
  • Rainbow 4520 XL Dielectric[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]—
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Configuration—Envision[4]
Wafer Sizes—6 inch[4]
Gases—C4F8, SF6, CHF3, CH3F, Ar, O2, N2, CF4[1]
Category—Etch / Dielectric Etch[1]
Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]inventory listing