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0010-22161 High EFF RF MatchversusAdixen ASM 182 TD+ Helium Leak Detector

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Adixen ASM 182 TD+ Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run—–2025
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer Adixen
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]ASM 182 TD+[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
P/N—D 70 RTS 0 PB 710[3]
Manufacturer—Pfeiffer Vacuum[4]
Detection method—Vacuum and Sniffing Leak Detection[5]
Pumping speed for He—4.4 l/s[5]
Backing pump capacity—25 m^3/h[5]
Backing pump—Oil-Free Backing Pump[5]
Flange model (inlet)—DN 40 ISO-KF[5]
Supply—110–130 V, 50/60 Hz[5]
Language—English[5]
Mains cable—US power cable[5]
Dimensions (L x W x H)—601 x 487 x 456 mm[5]
Weight—88 kg[5]
Minimum detectable leak rate for helium (sniffing leak detection)—1 x 10^-8 Pa m3/s[5]
Minimum detectable leak rate for helium (vacuum leak detection)—5 x 10^-13 Pa m3/s[5]
Noise level—65 dB(A)[5]
Power consumption max.—1500 W[5]
Start-up time with calibration—< 5.5 min[5]
Start-up time without calibration—< 4 min[5]
User interface—Basic User Interface[5]
Test method—Vacuum and Sniffing Leak Detection[5]
Type—High Performance - Compact[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]ajvs.comajvs.com
  5. [5]ajvs.comajvs.com