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0010-22161 High EFF RF MatchversusEnviro II

Applied Materials 0010-22161 High EFF RF Match, Ulvac Enviro II, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsUlvac
Category——
Wafer size——
Process node——
Introduced——
Production run——
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Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchUlvac Enviro II
Specifications
MakeApplied Materials[1]Ulvac[4]
Model0010-22161[1]Enviro II[4]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Parts unit[3]
System type—Dual chamber advanced RF strip system[5]
Wafer size—200mm (8")[5]
Date of manufacture—03/27/2009[5]
Input—3Ø, 208VAC, 50/60Hz, 86A[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]semistarcorp.comsemistarcorp.com