Waferpedia

Comparison ledger

0020 17485 PartversusMark 50

Applied Materials 0020 17485 Part, CHA Mark 50, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartCHA Mark 50
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]updated to control the deposition and chambers.[2]
Process type—Physical Vapor Deposition (PVD)[3]
Wafer size—6 inch[3]
Deposition type—Thin-film deposition[4]
Control upgrade—Computer added to track processes[2]
Power supply upgrade—New Glassman voltage supply[2]
Controller upgrade—Updated Infinicon controller[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org