Waferpedia

Comparison ledger

0020 23839 PartversusAlpha 8 S Z LPCVD

Applied Materials 0020 23839 Part, Tokyo Electron Alpha 8 S Z LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
Alpha 8 S Z LPCVDTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartTokyo Electron Alpha
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]—
Water Exposure—water marks inside and outside the unit[2]
Process Type—Low Pressure Chemical Vapor Deposition (LPCVD)[2]
Vintage—1996[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing