Comparison ledger
Applied Materials 0020 81665 Part, Edwards IXH 610, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 81665 PartApplied Materials | IXH 610Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 81665 Part | Edwards IXH |
| Specifications | ||
| Configuration | Guide, Fiber Mount, Ude, Lk[1] | Fully refurbished[2] |
| Type | — | dry vacuum pump[3] |
| Application | — | harsh chemical applications[3] |
| Input power | — | 1.3 kW[3] |
| Peak pumping speed | — | 665 m3/h (391 CFM)[3] |
| Ultimate pressure | — | 3.7 x 10-3 Torr[3] |
| Inlet connection | — | ISO100[4] |
| Exhaust connection | — | KF40[4] |
| Weight | — | 782 lbs[4] |
| System power at ultimate | — | 2.6 kW[5] |
| Typical water flow | — | 3 l/m[5] |
| Purge flow range | — | 22/44 slm[5] |
| Dry pump size | — | 100 m3/h[5] |
| Booster size | — | 600 m3/h[5] |
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