Waferpedia

Comparison ledger

0021 32427 PartversusEX 250 HT Chiller

Applied Materials 0021 32427 Part, Neslab EX 250 HT Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 32427 PartApplied Materials
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 32427 PartNeslab EX 250 HT Chiller
Cited variants—
  • EX 250 HT Chiller with FTC 350 A[1]
  • EX 250 HT Chiller with Aerocool 250[2]
  • EX 250 HT with FTC 350 A[1]
  • EX 250 HT with Aerocool 250[2]
Specifications
ConfigurationCooling Plare, Countermatch,300mm Produc[3]With FTC 350 A[1]
Temperature range—-20°C to 300°C[1]
Pumping capacity—0 to 13 lpm.[1]
Work area—4½” L x 6” W x 9” D.[1]
Voltage—115V, 60 Hz, 9A[1]
Work Area—4½” L x 6” W x 9” D[2]
Voltage / Frequency / Current—115V, 60 Hz, 9A[1]
Volume—8 L[4]
Work area dimensions—4½” L x 6” W x 9” D[1]
Frequency—60 Hz[1]
Current—9A[1]
Included controller (listing 1)—FTC 350 A[1]
Included controller (listing 2)—Aerocool 250[2]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]sci-support.comsci-support.com