Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Applied Materials Centura 5200 RTP Reactor, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | Centura 5200 RTP ReactorApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials Centura 5200 RTP Reactor |
| Specifications | ||
| Voltage | — | 208 VAC, 3 Phase[1] |
| System Controller | — | Standard[1] |
| Fab installation | — | TTW[1] |
| System Umbilicals | — | 25 ft[1] |
| Loadlock Pump | — | Ebara[1] |
| Pump Size | — | A30[1] |
| I/O Slit Valve Type | — | Viton[1] |
| Gas Panel Purity | — | UHP[1] |
| Gas Panel Type | — | Standard[1] |
| Chambers | — | 1[1] |
| Power | — | 208 VAC, 3 Phase[1] |
| Y2k compliant | — | Yes[1] |
| OTF Certified | — | Yes[1] |
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