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0242-36515 RTP XE Chamber Temperature Match KitversusM 150 PC UV

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Axcelis M 150 PC UV, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsAxcelis
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Axcelis M 150 PC UV
Specifications
Configuration—Does not include boards[1]
Make—Axcelis[1]
Model—M 150 PC[1]
Equipment type—UV Cure System[2]
Wafer size—6 inch[1]
Vintage—2001 Vintage[1]
Does not include boards—Does not include boards[2]
Wafer Sizes—6 inch[1]
Category—Thermal / Diffusion[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com