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0242-36515 RTP XE Chamber Temperature Match KitversusLSA101

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Veeco LSA101, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LSA101Veeco
OEMApplied MaterialsVeeco
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced—2021
Production run——
Lifecycle——
Lifecycle milestones—2021 First shipment
Control system——
Generation——
Family—Veeco LSA101
Specifications
System type—Laser Spike Annealing System[1]
Process application—Precision doping of materials at a controlled temperature[1]
Origination facility—San Jose, California[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org