Comparison ledger
Applied Materials DPS 2, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DPS 2Applied Materials | 1512eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials DPS | Tegal 1512e |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 3 Poly, 1 Axiom[2] | — |
| Manufacturer | Applied Materials[2] | — |
| Model | DPS 2[2] | — |
| Category | Etch[4] | — |
| Wafer size | 12 inch[2] | — |
| Vintage | 2008[3] | — |
| Tool type | — | Industrial RIE plasma etcher system[5] |
| Stated configuration | — | With modules assembly for CI-4222[5] |
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