Waferpedia

Comparison ledger

Mirra Integraversus1 DP 41

Applied Materials Mirra Integra, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Mirra IntegraApplied Materials
1 DP 41Logitech
OEMApplied MaterialsLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1999 Vintage year—
Control system——
Generation——
FamilyApplied Materials MirraLogitech 1 DP 41
Specifications
ConfigurationPoly / STI[1]50/60 Hz[2]
Phase—3 Phase[2]
Voltage—480 V[2]
Make—Logitech[2]
Model—1 DP 41[2]
Frequency—50/60 Hz[2]
Current—12 amps[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing