Comparison ledger
Applied Materials Reflexion 3600, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Reflexion 3600Applied Materials | 100R16Strasbaugh |
|---|---|---|
| OEM | Applied Materials | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Reflexion | Strasbaugh 100R16 |
| Specifications | ||
| CE Segregation (NonCu/Open/Cu) | Cu[1] | — |
| Configuration | SW version:[1] | — |
| Reflexion Software | PB59M3i2[1] | — |
| MESA software | CB22M3i2[1] | — |
| ISRM software | IB11g5b[1] | — |
| FI robot type / controller | Kawasaki[1] | — |
| Load port | TDK TAS 300 (2)[1] | — |
| FI controller | AMAT VMICPCI-7326[1] | — |
| Wet robot type | Yaskawa WTM511-2-FWS02-V1-CU/0190-08246 (1)[1] | — |
| Polisher MEI B/D | AMAT 0100-00722 (3)[1] | — |
| Polisher AIO B/D | AMAT 0100-00396 (2)[1] | — |
| Polisher DIO B/D | AMAT 0100-01995 (7)[1] | — |
| Platen Driver | Yaskawa SGDH-75 AE (3)[1] | — |
| Cross Driver | Yaskawa SGDH-08 AE-S (1)[1] | — |
| Pad Conditioner/HCLU Driver | Yaskawa SGDH-01 AE (7)[1] | — |
| Head SWEEP Driver | Yaskawa SGDH-04 AE (4)[1] | — |
| Head Rotation Driver | SE 2 VOSTARCD CR 06250 (4)[1] | — |
| Meg Generator | Kaijo 600 (1)[1] | — |
| Mega Heater | Orion ETD 232-SA-A-UL (1)[1] | — |
| Slurry arm Type | AMAT 0040-78378 (3)[1] | — |
| Make | Applied Materials[1] | — |
| Model | Reflexion 3600[1] | — |
| Category | CMP (Chemical Mechanical Polisher)[1] | — |
| CE Segregation | Cu[1] | — |
| PC Arm assembly | AMAT 0010-25311 (3)[1] | — |
| iScan EndPoint module | AMAT 0010-37905[1] | — |
| Vintage | 2011[1] | — |
| type | — | 1 spindle grinder/polisher[2] |
| drive system | — | DC drive system with 2 motors[2] |
| spindle RPM | — | 1-180 RPM[2] |
| eccentric RPM | — | 1-90 RPM[2] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[2] |
| capacity | — | 16 inches[2] |
| spindle size | — | 1-8 TPI[2] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[2] |
| weight | — | 500 lbs[2] |
| origin | — | made in the USA[2] |