Waferpedia

Comparison ledger

VHCPversus160 XP Ion

Applied Materials VHCP, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VHCPApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VHCPVarian 160 XP Ion
Specifications
Configuration—150mm High Current IMP[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com