Waferpedia

Comparison ledger

A 412 Annealingversus1000 Hot Plate

ASM A 412 Annealing, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMASMCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASM A 412 AnnealingCEE 1000 Hot Plate
Specifications
ConfigurationVertical[1]4"[3]
ManufacturerASM[1]—
Model designationA 412[1]—
Equipment typeAnnealing Furnace[1]—
Wafer size12 inch[1]—
CategoryThermal / Diffusion[2]—
Type—Hot Plate[3]
Wafer Size—4 inch[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing