Comparison ledger
ASML PAS 2400, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PAS 2400ASML | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | ASML | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1985 Demonstration and first contract | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML PAS 2400 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Throughput | 90 wafers per hour[1] | — |
| Alignment method | Grid profile[1] | — |
| Wafer stage drive | Electric motors[1] | — |
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