Comparison ledger
ASML Twinscan AT 850 B Wafer, ASML Twinscan AT 850 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ASML | ASML |
| Category | Lithography | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2002 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan AT 850 | ASML Twinscan AT 850 |
| Cited variants | — | |
| Specifications | ||
| Phase | 3 Phase[3] | — |
| Configuration | 50/60 Hz[3] | With Tel Lithius Track[1] |
| Power | 3 Phase[4] | — |
| Electrical frequency | 50/60 Hz[3] | — |
| Optics | Cymer laser[3] | — |
| Vintage | 2002 Vintage[3] | — |
| Laser | — | Cymer ELS 7600[1] |
| Track | — | Tel Lithius Track[1] |
| Power Frequency | — | 50/60 Hz[2] |
| Make | — | ASML[1] |
| Model | — | Twinscan AT 850 D[1] |
| Mains frequency | — | 50/60 Hz[2] |
| Associated track | — | TEL Lithius Track[1] |
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