Comparison ledger
ASML XT 1700 Fi Immersion ARF, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | |
|---|---|---|
| OEM | ASML | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML XT 1700 Fi Immersion ARF | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | HDD Included[1] | — |
| Manufacturer | ASML[2] | — |
| Model | XT 1700 Fi[2] | — |
| Category | Lithography[1] | — |
| Tool type | Scanner[2] | — |
| Optics & imaging | Cymer XLA360 Laser[1] | — |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →