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Comparison ledger

17099370 Outer strike plateversus6200 A

Axcelis 17099370 Outer strike plate, Axcelis 6200 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6200 AAxcelis
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateAxcelis 6200 A
Specifications
ConfigurationUsed with Axcelis GSD 200[1]Auto recipe load[2]
Equipment type—Ion implanter[2]
Wafer size—6 inch[2]
Automatic recipe load—Supported[2]
Category—Ion Implantation[3]
Equipment type (NV 6200 A Ion)—Ion implanter made by Axcelis[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com