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200 PCU Photoresist StabilizerversusWS 400 B 6 NP P Spin

Axcelis 200 PCU Photoresist Stabilizer, Laurell WS 400 B 6 NP P Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCU Photoresist StabilizerAxcelis
WS 400 B 6 NP P SpinLaurell
OEMAxcelisLaurell
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Laurell WS 400 B 6 NP P Spin
Specifications
Configuration14 Amps[1]—
Voltage380 V[1]—
Frequency50 Hz[1]—
Phase3 Phase[1]—
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing